Micro and Nano Robotic Manipulation Systems
نویسندگان
چکیده
A nanolaboratory—a prototype nanomanufacturing system—is presented, which is composed with a nanorobotic manipulation system with 4 units and 16 degrees-offreedom (DOFs), a nano fabrication system based on electron-beam-induced deposition (EBID) with an internal or external precursor evaporation reservoir equipped with a thermal field emission electron source or a nanotube cold cathode, and a real-time observation and measurement system based on a field emission scanning electron microscope (FESEM) equipped with 3-4 conventional atomic force microscope (AFM) cantilevers, piezoresistive levers or nanotube probes. Nanotube devices including a mass flow sensor, a linear bearing, nanotube scissors and thermal probes are fabricated in the nanolaboratory.
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